About: http://webisa.webdatacommons.org/205322084

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	techniques, such as lithography (e.g., photolithography), etching, sputtering and chemical vapor deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com