About: http://webisa.webdatacommons.org/205700922

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, by low-pressure CVD, plasma CVD, sputtering, or other techniques, an intrinsic (I-type) amorphous silicon film 303 is deposited to a thickness of 25 to 100 nm, for example, to 50 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca