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About:
http://webisa.webdatacommons.org/205952280
Property
Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value
A probe card as claimed in claim 7, wherein said voltage providing unit is formed on an area other than areas of said backside of said substrate corresponding to areas of said one side of said substrate where said contactor is formed.
http://www.w3.org/ns/prov#wasQuotedFrom
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