| http://www.w3.org/ns/prov#value | - A process for forming a desposition film suitable for use in semiconductor devices or electrophotographic photosensitive devices on a substrate in a deposition space (A), which Comprises:forming a gaseous activated species (a) by decomposing a starting material selected from the group consisting of the compounds of the formulas: Sin X2n+2 (SiX2-n (n???3) Sin HX2n+1 Sin H2 X2n wherein n is an integ
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