About: http://webisa.webdatacommons.org/205987463

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Optionally, a cleaning agent, such as oxygen and/or dissassociated fluorine, may be provided through the central gas delivery line 380 to the chamber body 302 to remove deposition byproducts and films from processing chamber hardware.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com