| http://www.w3.org/ns/prov#value | - A planar intertial sensor for manifesting acceleration along an input (Z) axis, comprising a sheet member and associated base member, said base member including means for supporting the peripheral region of said sheet member in a plane perpendicular to said input (Z) axis, said plane including a first (X) reference axis and a second (Y) reference axis, said first and second reference axes being mu
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