| http://www.w3.org/ns/prov#value | - A planar shape of the preliminary heating layer when viewed from the one principal surface has at least one first region overlapping the thin film semiconductor layer, and a second region other than the first region; and a planar shape of the second region has two rotationally symmetrical portions in which when one rotationally symmetrical portion axially rotates with a rotationally symmetrical ax
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