| http://www.w3.org/ns/prov#value | - A polishing pad assembly includes a polishing layer including a polishing surface, and a substrate contacting member flexibly coupled to the polishing layer having a top surface to contact...http://www.google.com/patents/US7727049?utm_source=gb-gplus-sharePatent US7727049 - Friction sensor for polishing systemAdvanced Patent SearchPublication numberUS7727049 B2Publication typeGrantApplication numb
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