| http://www.w3.org/ns/prov#value | - A partition 1526 is formed around the chamber C and the electron beam irradiating tip 1502 to separate the electron beam irradiating tip 1502 from the chamber C. This partition 1526 is coupled to a freezer 1530 through a supporting member 1529 made of a high thermally conductive material such as copper and aluminum, and is cooled at ???100??? C. to ???200??? C. A member 1527 is provided for preven
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