| http://www.w3.org/ns/prov#value | - A problem in the flatness of the surface of the polishing tool as described above is a problem peculiar to the case where a grindstone having a thickness of a few centimeters is used, which could be almost ignored in a general polishing pad for loose abrasive grain processing in which elastic modulus of a pad material is soft such as 10 kg/mm2 or less and thickness is thin such as approximately 1
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