| http://www.w3.org/ns/prov#value | - providing a substrate; providing a sputtering apparatus including at least one target; introducing a first gas proximate a first side of the target and a second gas proximate a second side of the target, the first gas including more oxygen than the second gas so that as the substrate passes below the target an oxidation graded layer is formed, the oxidation graded layer being more oxidized at one
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