| http://www.w3.org/ns/prov#value | - phragms with quasi rectangular active areasUS4366716 *11 mars 19814 janv. 1983Hokushin Electric Works, Ltd.Pressure transducerUS4389895 *27 juil. 198128 juin 1983Rosemount Inc.Capacitance pressure sensorUS4410872 *27 ao???t 198018 oct. 1983Robert Bosch GmbhElectrical thick-film, free-standing, self-supporting structure, and method of its manufacture, particularly for sensors used with internal com
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