| http://www.w3.org/ns/prov#value | - A pattern forming process comprising the steps of: coating a resist material comprising:(a) a polymer represented by the formula (1): ##STR51## wherein R1 is a hydrogen atom or a methyl group; R2 and R3 are independently a hydrogen atom, a straight-chain, branched or cyclic alkyl group having 1-6 carbon atoms, a straight-chain or branched haloalkyl group having 1-6 carbon atoms, or a phenyl group,
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