PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • A production method according to the present invention is a method for producing an actuator in which an electrostatic attraction occurring between a movable electrode and a stationary electrode causes displacement of the movable section, and is characterized by comprising: a step of forming the stationary electrode on a base; a step of depositing a first sacrificial layer on the stationary electr
http://www.w3.org/ns/prov#wasQuotedFrom
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