PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Application of the present invention is suitable both in conveying systems employing drive-wheels both for supporting and conveying objects, and particularly in conveying systems where aeromechanical (AM) support means (non-contact???NC???platforms that generate an air-cushion to support the substrate) are used for supporting the substrates while conveyed over the platform driven by the vacuum-pre
http://www.w3.org/ns/prov#wasQuotedFrom
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