About: http://webisa.webdatacommons.org/206585150

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Although the present embodiment employed silicon as a material for substrate, the substrate material may be a ceramic such as silicon carbide (SIC) or glass.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com