About: http://webisa.webdatacommons.org/206768221

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	By carrying out the present invention, the reliability of a TFT can be increased, and especially the reliability of an n-channel TFT can be increased.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com