About: http://webisa.webdatacommons.org/207017503

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, where mask layer 16 is a dielectric material, such as silicon nitride, liner layer 30 can be a silicon oxide material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com