About: http://webisa.webdatacommons.org/207032004

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, when reducing the film thickness, there is a problem of mixing on the atomic level between layers adjacent to each other in the vertical direction, there is a limit in reduction in thickness of each layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com