About: http://webisa.webdatacommons.org/207145690

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, system 20 may include supply line 78 for supplying a rinsing solution, such as deionized water, to process chamber 22.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com