About: http://webisa.webdatacommons.org/207248135

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To address these and other concerns, the present invention is a method for computing the image intensity within an area of a wafer when using partially coherent illumination of three-dimensional features on a mask.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr