About: http://webisa.webdatacommons.org/207275202

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, substrate 10 may be a semiconductor chip, wafer, interconnect structure, circuit board, metal layer, insulator or other like material in which an image can be formed thereon by lithography and etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com