About: http://webisa.webdatacommons.org/207581085

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, there is a problem in that the characteristic is varied because of variations in film thickness of the silicon oxide film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com