About: http://webisa.webdatacommons.org/207586803

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, there is a problem in that it is very difficult to uniformly remove the damaged layer in the wet etching as is well known.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com