About: http://webisa.webdatacommons.org/207629146

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, the substrate 1 can be made of inexpensive material such as Si or glass.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com