About: http://webisa.webdatacommons.org/208079449

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A variety of chemical vapor deposition (CVD) techniques for combining gases and forming plasma can be utilized, including adapting techniques known in the art.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com