About: http://webisa.webdatacommons.org/208437595

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The variance in the polishing rate can be particularly difficult to control when slurries with very small abrasive particles are used on wafers with a high density of small features.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au