About: http://webisa.webdatacommons.org/208584267

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The upper most layer of the gate patterns 64 a and 64 b may comprise an insulating layer, such as a silicon oxide layer, a silicon nitride layer, and/or a silicon acid nitride layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com