| http://www.w3.org/ns/prov#value | - The portion 27 of the backing plate to be exposed to vacuum, either between adjacent ones of tiles 30 or about the periphery or dark space region 27 of target 12 should be bead blasted or otherwise etched and plasma spray coated with a material such as alumina or silica to prevent contamination of the process by the target backing plate material.
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