About: http://webisa.webdatacommons.org/208911440

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The electronic control means is connected for physically altering a parameter such as substrate transport velocity, precursor gas flow rate, oven temperature or combinations thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com