About: http://webisa.webdatacommons.org/208994835

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When trouble occurring in a FOUP opener is to be coped with and maintenance such as exchanging the component is to be performed, the operator must access the inside of the port door.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com