About: http://webisa.webdatacommons.org/20900199

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The ellipsometer of claim 1, wherein the detector means is a spectrometer, and wherein the spectrometer includes photosensitive means for measuring intensity of said output beam at each of a number of different wavelength ranges. 11.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com