About: http://webisa.webdatacommons.org/209127964

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The object of the present invention is a method of etching a mask layer to act as a protecting layer for metal contact windows using a victim layer with slopes to avoid undercutting.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es