About: http://webisa.webdatacommons.org/209228973

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The following table 1 shows an example of kinds of gas that are necessary when the plasma CVD device shown in FIG. 16 is used for forming a thin film other than a silicon oxide film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com