About: http://webisa.webdatacommons.org/209229028

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	That is, strict control of particles and metals on a substrate is required, and various types of washing liquids are therefore used in each of the semiconductor production processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr