About: http://webisa.webdatacommons.org/209260647

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The exposure apparatus of the present invention is an exposure apparatus which guides exposure energy to a mask to thereby form a pattern on the mask onto the surface of a substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com