About: http://webisa.webdatacommons.org/209599999

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Additionally, it is contemplated that workpieces other than semiconductor wafers may be provided within the pods, including reticles, flat panel displays, and other substrates which may be stored and/or transported within pods.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr