| http://www.w3.org/ns/prov#value | - Although, in the above-described embodiment, the density in the X direction of the pattern in the pattern generator 3 has been taken twice as high as the density in the X direction of the pattern in the pattern generator 4, the present invention is not limited to such integral multiple, but any arbitrary number N or 1/N (where N is an integer of more than 2) can be selected.
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