About: http://webisa.webdatacommons.org/210261474

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also, materials such as silicon are preferred for plasma environments in which a lack of chemical compatibility between the silicon substrate and the surrounding collar ring can result in lower substrate yields.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com