About: http://webisa.webdatacommons.org/210364795

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A manufacturing method of a semiconductor device according to claim 1, wherein the semiconductor device is a memory, a CPU, an integrated circuit, or an RFID tag.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com