About: http://webisa.webdatacommons.org/210380730

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Embodiments of the present invention are a method for applying a material on a coupled wafer pair in order to fill a gap between wafers of the coupled wafer pair.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com