About: http://webisa.webdatacommons.org/210417277

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Over the semiconductor layers 10 and 11, an insulating layer including silicon oxide or silicon nitride in at least one part thereof is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com