About: http://webisa.webdatacommons.org/210531981

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, a problem such that impurities such as carbon, hydrogen, and so forth are easy to be left on the metal oxide film is raised.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com