About: http://webisa.webdatacommons.org/210543665

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, the substrate transport pallet 114 may be manufactured from stainless steel, titanium, graphite, or other suitable material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca