About: http://webisa.webdatacommons.org/210721028

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Ion implantation is a standard technique for the microelectronic industry in combination with well-established patterning procedures.
http://www.w3.org/ns/prov#wasQuotedFrom	science.gov