About: http://webisa.webdatacommons.org/210725238

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, formation of a MOS transistor in a smaller size is accompanied with problems such as short channel effect and punch-through.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com