About: http://webisa.webdatacommons.org/210930342

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, according to the present invention, as a substrate, an arbitrary substrate formed of an insulating material such as silicon oxide, titanium oxide, acryl resin, epoxy resin, polyimide or the like can be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com