About: http://webisa.webdatacommons.org/210972115

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, if we want to further reduce the nanostructure width, e.g. close to the exciton diffusion length (???10 nm), techniques such as e-beam lithography are needed to prepare the silicon mold, Yang elaborates.
http://www.w3.org/ns/prov#wasQuotedFrom	nanowerk.com