PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Examples of critical layers on a wafer surface which might need to be preserved from erosion or damage might include but are not limited to anti-reflective coating layers (ARC) or barrier layers such as titanium nitride or titanium.)
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com