About: http://webisa.webdatacommons.org/211351229

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The sensor consists of a micromachined tube fabricated from silicon or other materials, such as quartz or glass.
http://www.w3.org/ns/prov#wasQuotedFrom	designnews.com